Equipment Equipment Information Asset #
Advanced Thermal Sciences/ATS DEX-20A Thermo Chiller Details CH-1079
SMC HRGC002-W-T Chiller Details CH-1095
SMC INR-498-012D-X007 Thermo Chiller Details CH-1098, CH-1097
SMC INR-498-003B-X019 Chiller Details CH-1099
SMC INR-498-043 Chiller Details CH-1100
SMC INR-496-001C Chiller Details CH-1101
SMC HRB4007Z-X003 Chiller Details CH-1102, CH-1103, CH-1104
SMC HRS024-WN-20-T Chiller Details CH-1105
Advanced Thermal Sciences/ATS NX-20A-GL Chiller AMAT 0190-17815 ATS 4088230-001 Details CH-1106, CH-1107
SAES/Entegris PS7-MGT40-H2 Hydrogen Purifier 40 M3/Hr(665 Lpm,23.5 CFM)MegaTorr Details CS-1112
Adixen Alcatel A100V Dry Vacuum Pump Details CS-1120, CS-1121
Alcatel Adixen Pfeiffer ACP 28i Dry Vacuum Pump (PN: V5SATSBFAF) Details CS-1122
CTI-Cryogenics 10F Cryopump (PN 8116243G001) Details CS-A-1000
ADT 7200 Dicing Saw (PN: 07100-0050-002-00) Details CS-BT-1001
Nitto Denko DR8500-II Taper Details CS-BT-1002
Semiconductor Equipment Corp. Model 3250 Back Lap Tape Applicator (PN: 3250-003 Rev. C) Details CS-BT-1007
Solitec VBS-200 Photoresist Details CS-BT-1008
Rucker & Kolls/R&K 260 Wafer Prober Details CS-BT-1009
Ebara AA200W Dry Vacuum Pump Details CS-G-0043, CS-G-0044, CS-G-0045, CS-G-0046, CS-G-0047
TDI Power XBL 100-600-6000-AIR Details ET-1000
Bruker AXS D8/Discover XRD Details FA-1000
LAM 16-Line IGS Gas Box Part Number 571-033051-004 Details GB1111
LAM 16-Line IGS Gas Box Part Number 571-033051-003 Details GB1112
Hitachi 560-6590 HV Controller CD-SEM Details H-1112
Hitachi 560-5160 HV Controller CD-SEM Details HI-2222

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