Equipment Equipment Information Asset #
Advanced Energy/AE RFG 3002 RF Generator (Axcelis PN: 190000552) Details 92794
Steag AG AWP Wet Station Details 928
Sumitomo KZ-8L3S Cryo Pump Details 92807
Rorze RR717+ Wafer Robot Details 92811
Rorze RR717 Wafer Robot Details 92814
March PX-250 Plasma Etcher Details 92822
Mattson Millios Anneal System Details 92823
Mattson Helios Anneal System Details 92824
Rorze RR757 Wafer Robot Details 92825
ADT 7900 Wafer Dicing Saw Details 92828
Datacon APM 2200 Details 92830
Cognex In-Sight 1720 IS1720 Wafer Reader (PN: 8210063-1R A) Details 92833
Cognex In-Sight 1740 IS1740 Wafer Reader (PN: 8210066-1R B) Details 92834
Teradyne MicroFlex Test Head Details 92836
Rohde & Schwarz/R&S FSV14 Details 92848
SMC INR-498-11D Heat Exchanger Details 92855
Palomar 3500-II Die Bonder Details 92856
LAM Bottom Electrode (PN: 715-031768-001) Details 92857
LAM 9600 Paddle Lifter (PN: 853-032776-001) Details 92858
Applied Materials/AMAT Centura 5200 WxP 3 Chamber Details 92861
Applied Materials/AMAT P5000 DCVD 3 Chamber TEOS Deposition Details 92864
Entegris Ultrapak PH9150 150mm 6" Wafer Details 92868
VI Technology VI 3K2 AOI Details 92876
ASM Siemens Siplace 80F4 SMT Pick & Place Details 92877
ASM Siemens Siplace 80S20 SMT Pick and Place Details 92878

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