Equipment Equipment Information Asset #
Innolas ILS TT Laser Details 1790
YES 3 HMDS Vapor Prime Oven Details 17924
Brooks VCE6 Vacuum Cassette Elevator Details 181
Nikon NSR-2005 i9 Stepper Details 18204
SSI 150 Photoresist Coater Developer Details 18205
Matrix SystemOne 106 Plasma Asher Details 18207
Nikon Optiphot 88 Inspection Microscope Details 18208
Thermco 10K Furnace System Details 18212
AG Associates 8108 RTA Details 18223
Applied Materials/AMAT Centura 5300 DCVD Details 18225
Applied Materials/AMAT P5000 Polysilicon/Oxide Dry Etch Details 18232
LAM 490B Polysilicon/Nitride Dry Etch Details 18233
Temescal Semiconductor VES 2550 E-Beam Evaporator Details 18235
Applied Materials/AMAT Endura Sputter Details 18236
KLA-Tencor UV-1280 Prometrix Details 18237
KLA-Tencor Prometrix Omnimap 111B Resistivity Mapping Details 18240
Strasbaugh 6EC Dielectric CMP Details 18244
Solitec 5110 Manual Photoresist Coater Details 18251
Blue M DDC-146C Details 18252
Nikon Nomarski Microscope Details 18253
Nikon MM-1 Measuring Microscope Details 18257
MRL 718 Furnace Details 18258
AG Associates Heatpulse 210T-02 Details 18259
Laminaire Wet Chemical Process Station Details 18267
Perkin Elmer 4450 Sputter Details 18270

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