Equipment Equipment Information Asset #
Hitachi HF-3300 TEM Details 17715
Hitachi SU-3500 SEM Details 17717
Brooks ATM-407B Robot Details 1782
Nikon EX14 Deep UV Stepper Details 17835
KLA-Tencor (PN: 363375) Details 1784
YES 1224P Vapor Deposition Oven Details 17840
SCP ATS 3500 Robot Details 17843
Verteq 1800-55 SRD/Spin Rinse Dryer Details 17845
SVG 8X Systems Details 17851
SVG 86X Systems Details 17852
RENA InOx Wet Bench Details 1786
SVG 8800 Coater Developer Track Details 17861
Innolas ILS TT Laser Details 1790
YES 3 HMDS Vapor Prime Oven Details 17924
Brooks VCE6 Vacuum Cassette Elevator Details 181
Nikon NSR-2005 i9 Stepper Details 18204
SSI 150 Photoresist Coater Developer Details 18205
Matrix SystemOne 106 Plasma Asher Details 18207
Nikon Optiphot 88 Inspection Microscope Details 18208
Thermco 10K Furnace System Details 18212
AG Associates 8108 RTA Details 18223
Applied Materials/AMAT Centura 5300 DCVD Details 18225
Applied Materials/AMAT P5000 Polysilicon/Oxide Dry Etch Details 18232
LAM 490B Polysilicon/Nitride Dry Etch Details 18233
Temescal Semiconductor VES 2550 E-Beam Evaporator Details 18235

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