Equipment Equipment Information Asset #
Vexta Oriental Motor UDK5214NW 5 Phase Stepper Motor Driver Details SC-1113J
Westech Avanti IPEC 472 CMP Polisher Details 1044F
Westech Avanti IPEC 472 CMP Polisher Details 1043F
Yamatake Sensing Control LOG-1222 Rev 002 RF Filter AMAT PN 0190-26809 Rev. 02 Details SC-1123S
Zygo Mark GPI XPS Interferometer Details 71471

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