| Equipment Information |
| KLA-Tencor 2131 Brightfield |
Details
|
1011F |
| DNS SK-W80A-AV0 Coater |
Details
|
1010F |
| DNS SCW-60A-AV 2 Coater |
Details
|
1009F |
| DNS SC-W60A-AVGLP SOG |
Details
|
1008F |
| DNS SDW-60A-AVP 2 Developer |
Details
|
1007F |
| DNS SDW-60A-AVP 2 Developer |
Details
|
1006F |
| DNS SC-W60A-AV 2 Coater |
Details
|
1005F |
| DNS SD-W60A-AVP 2 Developer |
Details
|
1004F |
| DNS SDW-60A-AVP 2 Developer |
Details
|
1003F |
| DNS SC-W60A-AV 2 Coater |
Details
|
1002F |
| DNS SCW-60A-AV 2 Coater |
Details
|
1001F |
