TEL - Tokyo Electron Ltd.
| Equipment | Equipment Information | Asset # |
|---|---|---|
| TEL Module Unit Assy No. 3M80-001941-14 | Details | SG-1118 |
| TEL SPA-TRIAS Plasma Nitridation Deposition | Details | RID14309 |
| TEL Trias TI/TiN-ALD MF CVD314-01 (4 Chamber) | Details | 1045F |
| TEL Trias Ti/TiN TEL MF CVD314-02 (4 Chamber) | Details | 1046F |
