TEL - Tokyo Electron Ltd.

Equipment	Equipment Information	Asset #
TEL Module Unit Assy No. 3M80-001941-14	Details	SG-1118
TEL Trias TI/TiN-ALD MF CVD314-01 (4 Chamber)	Details	1045F
TEL Trias Ti/TiN TEL MF CVD314-02 (4 Chamber)	Details	1046F