PRI Automation
| Equipment | Equipment Information | Asset # |
|---|---|---|
| PRI Automation ABM-507B-1-S-CE Wafer Robot | Details | WH-1216A |
| PRI Automation ATM-107B-2-S-CE-S293 Wafer Robot | Details | SC-1182B |
| PRI Automation ESC-200-S293 Wafer Robot Controller | Details | SC-1182A |
| PRI Automation PRE-300-CE Wafer Pre-Aligner | Details | WH-1017 |
