LAM Research
| Equipment | Equipment Information | Asset # |
|---|---|---|
| LAM 16-Line IGS Gas Box Part Number 571-033051-003 | Details | GB1112 |
| LAM 16-Line IGS Gas Box Part Number 571-033051-004 | Details | GB1111 |
| LAM 4520 Etcher | Details | 1839 |
| LAM 9500 Etcher | Details | RID9414 |
| LAM Lofat Assembly Base PL (PN: 853-025903-002) | Details | SC-1166 |
| Lam Research 2080TCU Chiller PN: 852-110198-001-0-6882 | Details | RID15753 |
