ATS - Advanced Thermal Sciences

Equipment Equipment Information Asset #
Advanced Thermal Sciences/ATS DEX-20A Chiller Details CH-1020
Advanced Thermal Sciences/ATS NX-20A-GL Chiller Details CH-1032
Advanced Thermal Sciences/ATS MPX-65BHO Chiller PN: 4092307-001 R1 Novellus 4092307-001 R1 Details CH-1070
Advanced Thermal Sciences/ATS ESL-60 Chiller Details CH-1073
Advanced Thermal Sciences/ATS MPX-45G Chiller Details CH-1074
Advanced Thermal Sciences/ATS AX-2020 Chiller Details CH-1075
Advanced Thermal Sciences/ATS MPX-45BHP Chiller Details CH-1076
Advanced Thermal Sciences/ATS DEX-20A Thermo Chiller Details CH-1079
Advanced Thermal Sciences/ATS NX-20A-GL Chiller AMAT 0190-17815 ATS 4088230-001 Details CH-1106, CH-1107